晶圓光阻塗佈機顯影機(SCT、SDT)
■ 產品規格
|
Item |
Equipment Unit |
Unit |
Qty’s |
|
1 |
Load Port Unit |
SET |
2 |
|
2 |
Centering Unit (Aligner Unit) |
SET |
1 |
|
3 |
Process Robot Unit |
SET |
1 |
|
4 |
Spin Coating Unit |
SET |
2 |
|
2-PR / 1-Rinse Coating |
SET |
2+1 |
|
|
1-EBR Etching |
SET |
1 |
|
|
1-Backside Clean |
SET |
1 |
|
|
Cover and Exhaust Function |
SET |
1 |
|
|
PR Arm Auto Dispense and Rinse |
SET |
1 |
|
|
5 |
Hot Plate Unit |
SET |
6 |
|
6 |
Cooling Plate Unit |
SET |
2 |
|
Chiller unit |
SET |
1 |
|
|
7 |
Chemical Supply Unit |
SET |
1 |
|
8 |
CCD Monitor unit |
SET |
1 |
