信閎科技有限公司

Item

Equipment Unit

Unit

Qty’s

1

Load Port Unit

SET

2

2

Centering Unit (Aligner Unit)

SET

1

3

Process Robot Unit

SET

1

4

Spin Coating Unit

SET

2

2-PR / 1-Rinse Coating

SET

2+1

1-EBR Etching

SET

1

1-Backside Clean

SET

1

Cover and Exhaust Function

SET

1

PR Arm Auto Dispense and Rinse

SET

1

5

Hot Plate Unit

SET

6

6

Cooling Plate Unit

SET

2

Chiller unit

SET

1

7

Chemical Supply Unit

SET

1

8

CCD Monitor unit

SET

1